Electromagnetic Induction Heating for the 70 nm Node.
| Autor: | Thompson, Keith, Booske, John H., Cooper, R. F., Gianchandani, Y. B. |
|---|---|
| Zdroj: | MRS Online Proceedings Library; 2002, Vol. 717 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Thompson, Keith, Booske, John H., Cooper, R. F., Gianchandani, Y. B. |
|---|---|
| Zdroj: | MRS Online Proceedings Library; 2002, Vol. 717 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
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