Correlation of In and Ex Situ Stress to Microstructures during Al-Induced Crystallization of PECVD Amorphous Silicon.
| Autor: | Ray, S., Lian, Y.G., Sriram, V., Tucker, D. J., Pan, G. Z. |
|---|---|
| Zdroj: | MRS Online Proceedings Library; 2005, Vol. 862 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
Full text from SpringerLink