Ni-Silicided Deep Source/Drain Junctions Formed by Solid Phase Epitaxial Regrowth.
| Autor: | Lauwers, Anne, Lindsay, Richard, Henson, Kirklen, Severi, Simone, Akheyar, Amal, Pawlak, Bartek J., de Potter, Muriel, Maex, Karen |
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| Zdroj: | MRS Online Proceedings Library; 2004, Vol. 810 Issue 1, p111-116, 6p |
| Databáze: | Complementary Index |
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