Uniform, High Performance Poly-Si TFTs Fabricated by Laser- Crystallization of PECVD-Grown a-SI:H.

Autor: Toet, D., Sigmon, A. T. W., Takehara, A. T., Tsai, B. C. C., Harshbarger, W. R.
Zdroj: MRS Online Proceedings Library; 2000, Vol. 621 Issue 1, p1-6, 6p
Databáze: Complementary Index
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