Novel Wafer Dicing and Chip Thinning Technologies Realizing High Chip Strength.

Autor: Takyu, Shinya, Kurosawa, Tetsuya, Shimizu, Noriko, Harada, Susumu
Zdroj: MRS Online Proceedings Library; 2006, Vol. 970 Issue 1, p1-12, 12p
Databáze: Complementary Index