Post Deposition Ultraviolet Treatment of Silicon Nitride Dielectric: Modeling and Experiment.
| Autor: | Zubkov, Vladimir, Balseanu, Mihaela, Xia, Li-Qun, M'Saad, Hichem |
|---|---|
| Zdroj: | MRS Online Proceedings Library; 2006, Vol. 910 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
Full text from SpringerLink