Surface Modification of Silicon Nano Mechanical Structures by Carbon Ion Implantation for Post-fabrication Transformation to Silicon Carbide.

Autor: Virwani, Kumar R., Sood, Dinesh K., Elliman, Robert G., Malshe, Ajay P.
Zdroj: MRS Online Proceedings Library; 2005, Vol. 908 Issue 1, p1-6, 6p
Databáze: Complementary Index
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