Determination of Elastic Modulus of Piezoelectric Aluminum Nitride Coating.

Autor:	S Perooly, Soma, Garg, Varun, Md, H. Rahman, Rosenberger, L. W., Gina, S. Shreve, Ronald, F. Gibson, Auner, G. W.
Zdroj:	MRS Online Proceedings Library; 2005, Vol. 888 Issue 1, p1-6, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink