Shallow Junction Engineering by Phosphorus and Carbon Co-implantation: Optimization of Carbon Dose and Energy.
| Autor: | Cagnat, Nathalie, Laviron, Cyrille, Mathiot, Daniel, Rando, Chris, Juhel, Marc |
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| Zdroj: | MRS Online Proceedings Library; 2007, Vol. 994 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
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