The Carbon Co-implant with Spike RTA Solution for Boron Extension.
Autor: | Pawlak, Bartek J., Augendre, Emmanuel, Severi, Simone, Eyben, Pierre, Janssens, Tom, Falepin, Annelies, Absil, Philippe, Vandervorst, Wilfried, Felch, Susan, Collart, Erik, Schreutelkamp, Robert, Cowern, Nick |
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Zdroj: | MRS Online Proceedings Library; 2006, Vol. 912 Issue 1, p1-6, 6p |
Databáze: | Complementary Index |
Externí odkaz: |