Effects of Composition on the Microstructures and Optical Properties of Hydrogenated Amorphous Silicon Carbide Films Prepared by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition.
| Autor: | Chan, Lih-Hsiung, Chou, Wei-Zen, Chou, Lih-Hsin |
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| Zdroj: | MRS Online Proceedings Library; 1999, Vol. 593 Issue 1, p535-540, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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