Surface-Particle Interactions in the Chemical Mechanical Polishing Process.

Autor: Adler, J. J., Rabinovich, Y. I., Singh, R. K., Moudgil, B. M.
Zdroj: MRS Online Proceedings Library; 1997, Vol. 501 Issue 1, p387-392, 6p
Databáze: Complementary Index
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