Effect of Cl in Gate Oxidation.

Autor: Mertens, P. W., McGeary, M. J., Schaekers, M., Sprey, H., Vermeire, B., Depas, M., Meuris, M., Heyns, M. M.
Zdroj: MRS Online Proceedings Library; 1997, Vol. 477 Issue 1, p89-100, 12p
Databáze: Complementary Index
Externí odkaz: