Microstructure Characterization of Amorphous Silicon Films by Effusion Measurements of Implanted Helium.

Autor: Beyer, W., Hilgers, W., Lennartz, D., Maier, F. C., Nickel, N. H., Pennartz, F., Prunici, P.
Zdroj: MRS Online Proceedings Library; 2013, Vol. 1536 Issue 1, p175-180, 6p
Databáze: Complementary Index