Microstructure Characterization of Amorphous Silicon Films by Effusion Measurements of Implanted Helium.
Autor: | Beyer, W., Hilgers, W., Lennartz, D., Maier, F. C., Nickel, N. H., Pennartz, F., Prunici, P. |
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Zdroj: | MRS Online Proceedings Library; 2013, Vol. 1536 Issue 1, p175-180, 6p |
Databáze: | Complementary Index |
Externí odkaz: |