Retaining Ring Design Impact on CMP Process Stability and Optimization.

Autor: Smith, Joseph E., Wargo, Christopher, Kakireddy, Raghava, Singh, Rakesh, Galpin, Andrew, Philipossian, Ara, Wei, Xiaomin, Bennedine, Karim, Reversat, Claude, Chabourel, Alain
Zdroj: MRS Online Proceedings Library; 2010, Vol. 1249 Issue 1, p1-8, 8p
Databáze: Complementary Index
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