Reducing Time Dependent Line to Line Leakage Following Post CMP Clean.

Autor: Canaperi, Donald F., Papa Rao, Satyavolu S., Hurd, Trace Q., Medd, Steven B., Levin, T. M., Penny, Christopher J., Chen, James H. C., Smalley, Matthew A.
Zdroj: MRS Online Proceedings Library; 2010, Vol. 1249 Issue 1, p1-7, 7p
Databáze: Complementary Index
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