An Alternative Non-contact Planarization Technique by Utilizing the Electrokinetic Phenomenon.

Autor: Leo, C. S., Ng, S. H., Butler, D. L., Danyluk, S.
Zdroj: MRS Online Proceedings Library; 2010, Vol. 1249 Issue 1, p1-6, 6p
Databáze: Complementary Index
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