Control of Trenching and Surface Roughness in Deep Reactive Ion Etched 4H and 6H SiC.
| Autor: | Beheim, Glenn M., Evans, Laura J. |
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| Zdroj: | MRS Online Proceedings Library; 2006, Vol. 911 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Beheim, Glenn M., Evans, Laura J. |
|---|---|
| Zdroj: | MRS Online Proceedings Library; 2006, Vol. 911 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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