Deposition Mechanism of Oxide Thin Films Manufactured by a Focused Energetic Beam Process.

Autor: Wanzenboeck, H. D., Harasek, S., Langfischer, H., Bertagnolli, E.
Zdroj: MRS Online Proceedings Library; 2002, Vol. 749 Issue 1, p1-6, 6p
Databáze: Complementary Index