Characterization of Thick 4H-SiC Hot-Wall CVD Layers.

Autor: Paisley, M. J., Irvine, K. G., Kordina, O., Singh, R., Palmour, J. W., Carter, C. H.
Zdroj: MRS Online Proceedings Library; 1999, Vol. 572 Issue 1, p1-6, 6p
Databáze: Complementary Index
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