MEMS Microresonators for High Temperature Sensor Applications.

Autor:	Doppalapudi, Dharanipal, Mlcak, Richard, LeClair, Jeremie, Gwynne, Patrick, Bridgham, Jeffrey, Purchase, Scott, Skelton, Martin, Schultz, Gerald, Tuller, Harry
Zdroj:	MRS Online Proceedings Library; 2009, Vol. 1222 Issue 1, p1-6, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink