CVD Growth and Passivation of W and TiN Nanocrystals for Non-Volatile Memory Applications.

Autor:	Gay, G., Belhachemi, D., Colonna, J. P., Minoret, S., Beaurain, A., Pelissier, B., Roure, M. C., Lafond, D., Jalaguier, E., Molas, G., Baron, T., De Salvo, B.
Zdroj:	MRS Online Proceedings Library; 2010, Vol. 1250 Issue 1, p1-6, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink