Development of Double-cantilever Infrared Focal Plane Arrays: Fabrication and Post-process Curvature Modification.

Autor: Huang, Shusen, Lin, I-Kuan, Tao, Hu, Zhang, Xin
Zdroj: MRS Online Proceedings Library; 2006, Vol. 952 Issue 1, p1-7, 7p
Databáze: Complementary Index