Process Modeling of the Laser Induced Surface Modification of Ceramic Substrates for Thermal and Electrical Lines in Microsystems.

Autor: Gruhn, Herbert, Heidinger, Roland, Rohde, Magnus, Rüdiger, Sabine, Schneider, Johannes, Gahr, Karl-Heinz Zum
Zdroj: MRS Online Proceedings Library; 2000, Vol. 617 Issue 1, p1-6, 6p
Databáze: Complementary Index
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