Effects of Growth Parameters on Surface-morphological, Structural and Electrical Properties of Mo Films by RF Magnetron Sputtering.

Autor:	Kuo, Shou-Yi, Chang, Liann-Be, Jeng, Ming-Jer, Lin, Wei-Ting, Lu, Yong-Tian, Hu, Sung-Cheng
Zdroj:	MRS Online Proceedings Library; 2008, Vol. 1123 Issue 1, p1-6, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink