Dielectric Charging in Low Temperature Silicon Nitride for RF-MEMS Capacitive Switches.
| Autor: | Daigler, Richard, Papaioannou, George, Papandreou, Eleni, Papapolymerou, John |
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| Zdroj: | MRS Online Proceedings Library; 2008, Vol. 1075 Issue 1, p1-7, 7p |
| Databáze: | Complementary Index |
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