Thermally-Stable High Effective Work Function TaCN and Ta2N Films for pMOS Metal Gate Applications.

Autor: Adelmann, C., Lehnen, P., Ragnarsson, L.-Å., Conard, T., Franquet, A., Chang, V. S., Rohr, E., Meersschaut, J., Boissière, O., Lohe, C., Schram, T., Van Elshocht, S., De Gendt, S.
Zdroj: MRS Online Proceedings Library; 2008, Vol. 1073 Issue 1, p1-6, 6p
Databáze: Complementary Index
Externí odkaz: