Experimental Investigation of the Impact of Implanted Phosphorus Dose and Anneal on Dopant Diffusion and Activation in Germanium.

Autor:	Mazzocchi, Vincent, Koffel, Stéphane, Royer, Cyrille Le, Scheiblin, Pascal, Barnes, Jean-Paul, Hopstaken, Marco
Zdroj:	MRS Online Proceedings Library; 2008, Vol. 1070 Issue 1, p1-6, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink