Silicides for the 65 nm Technology Node.
| Autor: | Besser, Paul R., Chan, Simon, Paton, Eric, Kammler, Thorsten, Brown, David, King, Paul, Pressley, Laura |
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| Zdroj: | MRS Online Proceedings Library; 2003, Vol. 766 Issue 1, p1-11, 11p |
| Databáze: | Complementary Index |
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