Optimized Materials Properties for Organosilicate Glasses Produced by Plasma-Enhanced Chemical Vapor Deposition.

Autor:	O'Neill, M. L., Vrtis, R. N., Vincent, J. L., Lukas, A. S., Karwacki, E. J., Peterson, B. K., Bitner, M. D.
Zdroj:	MRS Online Proceedings Library; 2003, Vol. 766 Issue 1, p1-6, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink