Effects of VUV and EUV Radiation on Ultra Low-k Materials Damage.

Autor: Braginsky, Oleg, Kovalev, Alexander, Lopaev, Dmitry, Mankelevich, Yury, Proshina, Olga, Rakhimova, Tatyana, Rakhimov, Alexander, Vasilieva, Anna, Zyryanov, Sergey, Baklanov, Mikhail
Zdroj: MRS Online Proceedings Library; 2013, Vol. 1559 Issue 1, p1-6, 6p
Databáze: Complementary Index
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