Reliability of Silicon Nitride Gate Dielectric in Vertical Thin-Film Transistors.
| Autor: | Moradi, Maryam, Striakhilev, D., Chan, I., Nathan, A., Cho, N. I., Nam, H. G. |
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| Zdroj: | MRS Online Proceedings Library; 2007, Vol. 989 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
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