Engineered Low Resistivity Titanium-Tantalum Nitride Films by Atomic Layer Deposition.
| Autor: | Londergan, Ana R., Winkler, Jereld L., Vu, Kim, Matthysse, Lawrence, Seidel, Thomas E., Sneh, Ofer |
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| Zdroj: | MRS Online Proceedings Library; 2001, Vol. 714 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
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