β-Acetoxyethyl Silsesquioxanes: Chloride-Free Precursors for SiO2 Films Via Staged Hydrolysis.

Autor: Ezbiansky, Karin A., Arkles, Barry, Composto, Russell J., Berry, Donald H.
Zdroj: MRS Online Proceedings Library; 1999, Vol. 606 Issue 1, p1-6, 6p
Databáze: Complementary Index
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