High Rate Deposition of Stable Hydrogenated Amorphous Silicon in Transition from Amorphous to Microcrystalline Silicon.

Autor:	Hou, Guofu, Geng, Xinhua, Zhang, Xiaodan, Zhao, Ying, Xue, Junming, Ren, Huizhi, Sun, Jian, Zhang, Dekun, Xu, Yueqin
Zdroj:	MRS Online Proceedings Library; 2003, Vol. 762 Issue 1, p1-6, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink