Effects of Growth Parameters on Surface-morphological, Structural, Electrical and Optical Properties of AZO Films by RF Magnetron Sputtering.

Autor: Kuo, Shou-Yi, Lin, Wei-Ting, Chang, Liann-Be, Jeng, Ming-Jer, Lu, Yong-Tian, Hu, Sung-Cheng
Zdroj: MRS Online Proceedings Library; 2009, Vol. 1201 Issue 1, p1-6, 6p
Databáze: Complementary Index
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