Effects of Environment on Modlus of Low-k Porous Films Used in Back End of Line.
| Autor: | Simonyi, Eva E., Dimitrakopoulos, Christos D., Lane, Michael, Liniger, Eric, Volksen, Willi |
|---|---|
| Zdroj: | MRS Online Proceedings Library; 2007, Vol. 990 Issue 1, p1-9, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
Full text from SpringerLink