Comparison of the Fracture Behavior of Brittle ILD Films used in the BEOL in Dry and Wet Environment using Nanoindentation.
| Autor: | Simonyi, Eva E, Lane, Michael, Liniger, Erik, Grill, Alfred |
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| Zdroj: | MRS Online Proceedings Library; 2006, Vol. 914 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
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