Low Temperature Silicon Dioxide Deposition and Characterization.
| Autor: | Chatham, Hood, Mogaard, Martin, Okuyama, Yoshi, Treichel, Helmuth |
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| Zdroj: | MRS Online Proceedings Library; 2006, Vol. 913 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
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