Chemical Routes to Improved Mechanical Properties of PECVD Low K Thin Films.
| Autor: | Bilodeau, S.M., Borovik, A.S., Ebbing, A.A., Vestyck, D.J, Xu, C., Roeder, J.F., Baum, T.H. |
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| Zdroj: | MRS Online Proceedings Library; 2004, Vol. 812 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
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