New hybrid low-k dielectric materials prepared by vinylsilane polymerization.
| Autor: | Kang, Jung-Won, Kim, Byung Ro, Kang, Gwi-Gwon, Moon, Myung-Sun, Choi, Bum-Gyu, Ko, Min-Jin |
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| Zdroj: | MRS Online Proceedings Library; 2004, Vol. 812 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
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