Direct Bonding of Silicon Wafers with Simultaneous Dopant Diffusion.
| Autor: | Grekhov, Igor V., Agrunova, Tatiana S., Kostina, Lioudmila S., Shmidt, Natalia M., Föll, Helmut, Kostin, Konstantin B. |
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| Zdroj: | MRS Online Proceedings Library; 2001, Vol. 681 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
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