Evaluation of Mechanical and Tribological Behavior, and Surface Characteristics of CMP Pads.

Autor:	Sikder, A. K., Irfan, I. M., Kumar, Ashok, Belyaev, A., Ostapenko, S., Calves, M., Harmon, J. P., Anthony, J. M.
Zdroj:	MRS Online Proceedings Library; 2001, Vol. 671 Issue 1, p1-7, 7p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink