A CMP Numerical Model Combining Die Scale and Feature Scale Polishing Characteristics.
| Autor: | Delage, Stéphanie, Meyer, Frank, Springer, Goetz |
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| Zdroj: | MRS Online Proceedings Library; 2001, Vol. 671 Issue 1, p1-6, 6p |
| Databáze: | Complementary Index |
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