Preparation of sub-100nm Thickness PZT thin Films with Chemical Solution Deposition Method for low Voltage Operation.

Autor:	Lee, Yong Kyun, Lee, June Key, Kim, Chang Jung, Yi, Insook, Chung, Ilsub
Zdroj:	MRS Online Proceedings Library; 2000, Vol. 655 Issue 1, p228-233, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink