HTCVD growth of semi-insulating 4H-SiC crystals with low defect density.
Autor: | Ellison, A., Magnusson, B., Hemmingsson, C., Magnusson, W., Iakimov, T., Storasta, L., Henry, A., Henelius, N., Janzén, E. |
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Zdroj: | MRS Online Proceedings Library; 2000, Vol. 640 Issue 1, p1-11, 11p |
Databáze: | Complementary Index |
Externí odkaz: |