Viewport Influence on Optical Pyrometry and Deposition Process in MOCVD Vertical Rotating Disc Reactors.

Autor:	Prokopenko, Anton, Gurary, Alexander, Boguslavskiy, Vadim, Ramer, Jeffrey, Schurman, Matthew
Zdroj:	MRS Online Proceedings Library; 1999, Vol. 588 Issue 1, p1-6, 6p
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu Full text from SpringerLink