Dual Function Polyvinyl Alcohol Based Oxide Precursors for Nanoimprinting and Electron Beam Lithography.
| Autor: | Malowney, J., Mestres, N., Borrise, X., Calleja, A., Guzman, R., Llobet, J., Arbiol, J., Puig, T., Obradors, X., Bausells, J. |
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| Zdroj: | MRS Online Proceedings Library; 2013, Vol. 1547 Issue 1, p75-80, 6p |
| Databáze: | Complementary Index |
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