Excimer-Laser-Induced Melting and Solidification of PECVD a-Si films under Partial-Melting Conditions.

Autor: Hu, Q., Lee, Catherine S., Li, T., Deng, Y., Chung, U. J., Limanov, A. B., Chitu, A. M., Thompson, M. O., Im, James S.
Zdroj: MRS Online Proceedings Library; 2011, Vol. 1321 Issue 1, p1-6, 6p
Databáze: Complementary Index
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