Efficient Detection of Oxygen Vacancy Double Donors in Capacitors with Ultra-thin Ta2O5 Films for DRAM Applications by Zero-bias Thermally Stimulated Current Spectroscopy.
| Autor: | Lau, W. S., Zhong, L., Han, Taejoon, Sandler, Nathan P. |
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| Zdroj: | MRS Online Proceedings Library; 2005, Vol. 864 Issue 1, p1-5, 5p |
| Databáze: | Complementary Index |
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